MIMENTO - uFC
Scientific Area: Engineering and Technology.
EXPR: Mask design, etching, material growth (PVD, CVD, LPCVD, etc.), high resolution characterization (e-beam, ion beam), etc. MEMS & MOEMS silicon devices, LiNbO3 devices, photonic / acoustic / fluidic integrated circuits
Name of the service: MIMENTO – uFC.
Main responsible: Dr. Thomas Baron, Research Engineer, MIMENTO director.
Category of the service: Technological service.
Target group: Academic research, industrial R&D projects.
Scientific refence:
MIMENTO (MIcrofabrication for MEcanics, Nanosciences, Thermal and Optics)technology center is identified as a reference centre for Micro-nano-optics, Micro-nano-acoustics, Micro-Opto-Electro-Mechanical Systems (MOEMS) and Micro-Robotics in the context of the «RENATECH» network (French national network for large facilities involved in technological research in the field of micro and nanotechnology). The French RENATECH network is a partnership between 5 academic technology centers, LTM (Grenoble), C2N (Orsay / Marcoussis), IEMN (Lille), LAAS (Toulouse), FEMTO-ST (Besançon)) and also CEA – LETI (Grenoble). The purpose of RENATECH is to support French research in micro-nano-technologies by providing access to fabrication facilities and experts. Located on the TEMIS Technopole in Besançon, it has a total space of around 1300 m², of which 865 m² are ISO 5 to 7 classrooms. It is run by a technical team of 17 engineers and technicians whose role is to support research projects in the central (internal or external projects). It has a high-tech equipment park open to both academic and industrial partners in research collaborations. This technology centre has hosted numerous European (ERDF), national fundings and regional supports.
Offer description:
MIMENTO is an open academic technology facility operated by the FEMTO-ST research institute, in the area of micro-nano-fabrication technologies for the design of various integrated devies and systems (e.g. MEMS and MOEMS, photonic chips, acoustic filters, micro-fluidic chips, integrated sensors for gas, forces, pressure, etc.). It belongs to a national (RENATECH) and even EU network (EuroNanoLab) in micro-nano-fabrication technologies, thus having access to a broad range of micro-nano-technologies from the whole network beyond its own equipments and know-how. It can host any academic or industrial Research or Development project in micro-nano-fabrication (fully subcontracting through MIMENTO staff, or through the staff of FC’INNOV foundation and its FEMTO Engineering R&D center; or it can act as a partner, renting facilities, training users among which are many PhD students from FEMTO-ST or partner research institutions).
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